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发明授权
US07780491B2 Process for manufacturing plasma display panel and substrate holder 有权
制造等离子体显示面板和基板支架的工艺

Process for manufacturing plasma display panel and substrate holder
摘要：
The invention relates to a process for manufacturing plasma display panel and a substrate holder, preventing an occurrence of dust giving an unfavorable effect in a forming process of a film on a substrate of a plasma display panel in a film forming apparatus. When forming the film, a substrate (3) and a dummy substrate (35) are held by a first substrate holder (31) composed of a supporter sustaining underneath the substrate and a restrictor restricting a position of the substrates (3) in a plane direction, and a second substrate holder (32) sustaining the first substrate holder (31).
摘要（中）：

本发明涉及一种用于制造等离子体显示面板和衬底保持器的方法，防止在成膜设备中的等离子体显示面板的衬底上的膜的形成过程中产生不利影响的灰尘。 当形成膜时，基板（3）和虚设基板（35）由第一基板保持件（31）保持，第一基板保持件（31）由保持在基板下面的支撑件构成，限制器将基板（3）的位置限制在平面 方向，以及维持第一基板保持件（31）的第二基板保持件（32）。

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