发明授权
- 专利标题: Container for precision substrate
- 专利标题(中): 集装箱用于精密基板
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申请号: US10487840申请日: 2002-08-28
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公开(公告)号: US07781035B2公开(公告)日: 2010-08-24
- 发明人: Toshihiko Jimbo , Toshihide Murakami , Tadahiro Ohmi
- 申请人: Toshihiko Jimbo , Toshihide Murakami , Tadahiro Ohmi
- 申请人地址: JP Tokyo JP Sendai-shi
- 专利权人: Zeon Corporation,Tadahiro Ohmi
- 当前专利权人: Zeon Corporation,Tadahiro Ohmi
- 当前专利权人地址: JP Tokyo JP Sendai-shi
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2001-257460 20010828
- 国际申请: PCT/JP02/08652 WO 20020828
- 国际公布: WO03/021665 WO 20030313
- 主分类号: B32B1/02
- IPC分类号: B32B1/02 ; B32B27/00 ; B32B1/08
摘要:
A container for precision substrate having one or more component formed by molding a thermoplastic resin, characterized in that the component satisfies characteristics [1] and [2] below. [1] When being brought to contact ultra high purity argon gas (impurity concentration: 1 ppb or less) at 25° C. having a flow rate of 1.2 L/min., a water amount in said argon gas after 300 minutes is 30 ppb or less per a surface area 1 cm2 of the component. [2] When being placed in the air at 100° C., an increase amount of organics in the air in 300 minutes is 150 ng or less per weight 1 g of the component. According to the container, demands for low contamination can be satisfied.
公开/授权文献
- US20040224110A1 Container for precision substrate 公开/授权日:2004-11-11
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