发明授权
- 专利标题： Printing plate, method of fabricating the same, and method of fabricating flat panel display using the same
- 专利标题（中）： 印版，其制造方法以及使用其制造平板显示器的方法
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申请号： US11413571申请日： 2006-04-28
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公开(公告)号： US07781156B2公开(公告)日： 2010-08-24
- 发明人: Soon Sung Yoo , Youn Gyoung Chang , Heung Lyul Cho
- 申请人： Soon Sung Yoo , Youn Gyoung Chang , Heung Lyul Cho
- 申请人地址： KR Seoul
- 专利权人： LG Display Co., Ltd.
- 当前专利权人： LG Display Co., Ltd.
- 当前专利权人地址： KR Seoul
- 代理机构： Brinks Hofer Gilson & Lione
- 优先权： KR10-2005-0080558 20050831
- 主分类号： G03C11/00
- IPC分类号： G03C11/00 ; G03F1/00 ; H01L21/00
摘要：
A method of fabricating a printing plate includes: preparing a substrate; forming a metal layer on an entire surface of the substrate; forming a resist pattern on the metal layer, the resist pattern having a fine pattern exposing a portion of the metal layer; wet etching the exposed metal layer, and removing the resist pattern to form a metal layer pattern exposing a portion of the substrate; wet etching the exposed substrate, and removing the metal layer pattern to form a recessed pattern; and forming a compensation layer on an entire surface of the substrate where the recessed pattern is formed.
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