Invention Grant
- Patent Title: MEMS process and device
- Patent Title (中): MEMS工艺和器件
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Application No.: US11723514Application Date: 2007-03-20
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Publication No.: US07781249B2Publication Date: 2010-08-24
- Inventor: Richard I. Laming , Mark Begbie , Anthony Traynor
- Applicant: Richard I. Laming , Mark Begbie , Anthony Traynor
- Applicant Address: GB Edinburgh
- Assignee: Wolfson Microelectronics plc
- Current Assignee: Wolfson Microelectronics plc
- Current Assignee Address: GB Edinburgh
- Agency: Dickstein Shapiro LLP
- Priority: GB0605576.8 20060320
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connect the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.
Public/Granted literature
- US20070284682A1 Mems process and device Public/Granted day:2007-12-13
Information query
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