Invention Grant
- Patent Title: Method for manufacturing a memory
- Patent Title (中): 存储器制造方法
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Application No.: US12018209Application Date: 2008-01-23
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Publication No.: US07781279B2Publication Date: 2010-08-24
- Inventor: Hung-Mine Tsai , Ching-Nan Hsiao , Chung-Lin Huang
- Applicant: Hung-Mine Tsai , Ching-Nan Hsiao , Chung-Lin Huang
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agency: Winston Hsu
- Priority: TW96136925A 20071002
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A method for manufacturing a memory includes first providing a substrate with a horizontally adjacent control gate region and floating gate region which includes a sacrificial layer and sacrificial sidewalls, removing the sacrificial layer and sacrificial sidewalls to expose the substrate, forming dielectric sidewalls adjacent to the control gate region, forming a floating gate dielectric layer on the exposed substrate and forming a floating gate layer adjacent to the dielectric sidewalls and on the floating gate dielectric layer.
Public/Granted literature
- US20090087975A1 METHOD FOR MANUFACTURING A MEMORY Public/Granted day:2009-04-02
Information query
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