发明授权
- 专利标题： Piezoelectric element, ink jet recording head and ink jet printer
- 专利标题（中）： 压电元件，喷墨记录头和喷墨打印机
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申请号： US12047850申请日： 2008-03-13
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公开(公告)号： US07781946B2公开(公告)日： 2010-08-24
- 发明人: Hideto Izumi , Masao Nakayama
- 申请人： Hideto Izumi , Masao Nakayama
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Workman Nydegger
- 优先权： JP2007-072963 20070320
- 主分类号： H01L41/08
- IPC分类号： H01L41/08 ; B41J2/045
摘要：
A piezoelectric element includes: a base substrate; a lower electrode formed above the base substrate; a ferroelectric layer formed above the lower electrode; and an upper electrode formed above the ferroelectric layer, wherein an angle of a corner defined by a side surface of the ferroelectric layer and a top surface of the base substrate is between 45° and 75°.
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