Invention Grant
US07782161B2 Magnetically actuated microelectromechanical systems actuator 有权
磁致动微机电系统执行器

Magnetically actuated microelectromechanical systems actuator
Abstract:
A microelectrical mechanical system (MEMS) actuator having electrically conductive coils that create first magnetic fields that are opposed by a second magnetic field is disclosed. The actuator includes two coils having dual, interspersed Archimedean spirals. Within an actuator, one coil is arranged with spirals that proceed clockwise, while the other coil is provided with spirals that proceed counterclockwise. An electrically conductive bridge mechanically couples the two coils of each actuator to a mirror. Opposing magnetic fields are created to provide a force that urges the coils to expand so that the outermost portions of the coil extend upward, away from the substrate, and lift the bridge and mirror. Control current may then be modulated to increase and decrease the coil's magnetic field strength thereby increasing and decreasing the coil's extension to raise and lower relative to the substrate.
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