发明授权
US07782449B2 Method and apparatus for analyzing an optical device 有权
用于分析光学装置的方法和装置

Method and apparatus for analyzing an optical device
摘要:
Described are a method and apparatus for analysing an optical device, including: a) arranging an illuminating device which generates a test beam, the optical device that the test beam passes and a position-resolving sensor device which detects the test beam, relative to each other in a reference position that establishes a reference beam path; b) transmitting the test beam in a plurality of relative positions off set with respect to the reference position, relative to the reference position, the test beam being incident upon a measuring point assigned to the respective relative position on the optical device; c) detecting, for a respective relative position, a position of incidence of the test beam, after it passes the optical device, on one or a plurality of planes of detection offset relative to each other; d) determining the beam path of the test beam from the positions of incidence detected in step c) for each relative position and calculating optical characteristics of the optical device.
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