发明授权
- 专利标题: Achieving convergent light rays emitted by planar array of light sources
- 专利标题(中): 实现平面光源阵列发射的会聚光线
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申请号: US11482539申请日: 2006-07-07
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公开(公告)号: US07787159B2公开(公告)日: 2010-08-31
- 发明人: Leo Baldwin
- 申请人: Leo Baldwin
- 申请人地址: US OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: US OR Portland
- 代理机构: Stoel Rives LLP
- 主分类号: H04N1/04
- IPC分类号: H04N1/04
摘要:
Systems and methods are provided for achieving convergent light rays emitted by a planar array of light sources. In one embodiment, an imaging device is provided for inspecting semiconductors or other objects. The imaging device includes one or more imaging lens for imaging light reflected from an object. The imaging device also includes a first light source attached to a planar circuit board and a second light source attached to the planar circuit board. The imaging device further includes a first Fresnel prism for directing light from the first light source toward the object from a first direction and a second Fresnel prism for directing light from the second light source toward the object from a second direction. In one embodiment, the imaging device also includes one or more optical elements for increasing or decreasing the divergence of the light.
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