Invention Grant
US07787686B2 Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection
有权
用于工件检测的图像密度适应自动模式切换模式校正方案
- Patent Title: Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection
- Patent Title (中): 用于工件检测的图像密度适应自动模式切换模式校正方案
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Application No.: US12482836Application Date: 2009-06-11
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Publication No.: US07787686B2Publication Date: 2010-08-31
- Inventor: Junji Oaki , Shinji Sugihara
- Applicant: Junji Oaki , Shinji Sugihara
- Applicant Address: JP Kawasaki-shi
- Assignee: Advanced Mask Inspection Technology
- Current Assignee: Advanced Mask Inspection Technology
- Current Assignee Address: JP Kawasaki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-276586 20050922
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
Public/Granted literature
- US20090245619A1 IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION SCHEME FOR WORKPIECE INSPECTION Public/Granted day:2009-10-01
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