发明授权
US07787686B2 Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection 有权
用于工件检测的图像密度适应自动模式切换模式校正方案

Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection
摘要:
An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
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