发明授权
US07787686B2 Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection
有权
用于工件检测的图像密度适应自动模式切换模式校正方案
- 专利标题: Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection
- 专利标题(中): 用于工件检测的图像密度适应自动模式切换模式校正方案
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申请号: US12482836申请日: 2009-06-11
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公开(公告)号: US07787686B2公开(公告)日: 2010-08-31
- 发明人: Junji Oaki , Shinji Sugihara
- 申请人: Junji Oaki , Shinji Sugihara
- 申请人地址: JP Kawasaki-shi
- 专利权人: Advanced Mask Inspection Technology
- 当前专利权人: Advanced Mask Inspection Technology
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2005-276586 20050922
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
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