发明授权
US07790490B2 Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer 有权
用于制造微加工电容式超声换能器和相关微加工电容式超声换能器的表面微机械工艺

Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer
摘要:
The invention concerns a manufacturing process, and the related micromachined capacitive ultra-acoustic transducer, that uses commercial silicon wafer 8 already covered on at least one or, more preferably, on both faces by an upper layer 9 and by a lower layer 9′ of silicon nitride deposited with low pressure chemical vapour deposition technique, or deposition LPCVD deposition. One of the two layers 9 or 9′ of silicon nitride, of optimal quality, covering the wafer 8 is used as emitting membrane of the transducer. As a consequence, the micro-cell array 6 forming the CMUT transducer is grown onto one of the two layers of silicon nitride, i.e. it is grown at the back of the transducer with a sequence of steps that is reversed with respect to the classical technology.
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