发明授权
US07790552B2 Method for fabricating semiconductor device with bulb-shaped recess gate 失效
制造具有灯泡形凹槽的半导体器件的方法

Method for fabricating semiconductor device with bulb-shaped recess gate
摘要:
A method for fabricating a semiconductor device includes forming a plurality of bulb-shaped recesses in a substrate, forming a gate insulation layer over the substrate including the bulb-shaped recesses, forming a patterned first conductive layer over sidewalls of a bulb pattern of the corresponding bulb-shaped recesses, and forming a patterned second conductive layer over the gate insulation layer while filling the bulb-shaped recesses.
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