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US07790552B2 Method for fabricating semiconductor device with bulb-shaped recess gate
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制造具有灯泡形凹槽的半导体器件的方法
- 专利标题: Method for fabricating semiconductor device with bulb-shaped recess gate
- 专利标题(中): 制造具有灯泡形凹槽的半导体器件的方法
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申请号: US11803059申请日: 2007-05-11
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公开(公告)号: US07790552B2公开(公告)日: 2010-09-07
- 发明人: Sang-Hoon Cho
- 申请人: Sang-Hoon Cho
- 申请人地址: KR
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR
- 代理机构: Blakely, Sokoloff, Taylor & Zafman
- 优先权: KR10-2006-0122021 20061205
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for fabricating a semiconductor device includes forming a plurality of bulb-shaped recesses in a substrate, forming a gate insulation layer over the substrate including the bulb-shaped recesses, forming a patterned first conductive layer over sidewalls of a bulb pattern of the corresponding bulb-shaped recesses, and forming a patterned second conductive layer over the gate insulation layer while filling the bulb-shaped recesses.
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