发明授权
- 专利标题: Nonvolatile semiconductor memory device and method for fabricating the same
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US12166069申请日: 2008-07-01
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公开(公告)号: US07791121B2公开(公告)日: 2010-09-07
- 发明人: Koichi Kawashima , Keita Takahashi
- 申请人: Koichi Kawashima , Keita Takahashi
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2007-181723 20070711
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A nonvolatile semiconductor memory device includes bit line diffusion layers extending along the X direction in an upper portion of a semiconductor substrate; and gate structures extending along the Y direction on the semiconductor substrate and each including a charge trapping film and a gate electrode. The nonvolatile semiconductor memory device further includes a first interlayer insulating film in which first contacts respectively connected to the bit line diffusion layers are formed; and second contacts that penetrate through a UV blocking film and a second interlayer insulating film formed on the first interlayer insulating film and have bottom faces respectively in contact with the first contacts and top faces respectively in contact with metal interconnections.
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