发明授权
US07794539B2 Method for producing III group element nitride crystal, production apparatus for use therein, and semiconductor element produced thereby
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生产III族元素氮化物晶体的方法,其中使用的制造装置以及由此制造的半导体元件
- 专利标题: Method for producing III group element nitride crystal, production apparatus for use therein, and semiconductor element produced thereby
- 专利标题(中): 生产III族元素氮化物晶体的方法,其中使用的制造装置以及由此制造的半导体元件
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申请号: US10599501申请日: 2005-03-31
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公开(公告)号: US07794539B2公开(公告)日: 2010-09-14
- 发明人: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Yasuhito Takahashi
- 申请人: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Yasuhito Takahashi
- 申请人地址: JP Osaka JP Osaka
- 专利权人: Panasonic Corporation,Yusuke Mori
- 当前专利权人: Panasonic Corporation,Yusuke Mori
- 当前专利权人地址: JP Osaka JP Osaka
- 代理机构: Hamre, Schumann, Mueller & Larson, P.C.
- 优先权: JP2004-106676 20040331
- 国际申请: PCT/JP2005/006365 WO 20050331
- 国际公布: WO2005/095681 WO 20051013
- 主分类号: C30B9/00
- IPC分类号: C30B9/00 ; C30B30/04 ; C30B28/06 ; C30B11/00
摘要:
A method for producing Group-III-element nitride crystals by which an improved growth rate is obtained and large high-quality crystals can be grown in a short time, a producing apparatus used therein, and a semiconductor element obtained using the method and the apparatus are provided. The method is a method for producing Group-III-element nitride crystals that includes a crystal growth process of subjecting a material solution containing a Group III element, nitrogen, and at least one of alkali metal and alkaline-earth metal to pressurizing and heating under an atmosphere of a nitrogen-containing gas so that the nitrogen and the Group III element in the material solution react with each other to grow crystals. The method further includes, prior to the crystal growth process, a material preparation process of preparing the material solution in a manner that under an atmosphere of a nitrogen-containing gas, at least one of an ambient temperature and an ambient pressure is set so as to be higher than is set as a condition for the crystal growth process so that the nitrogen is allowed to dissolve in a melt containing the Group III element and the at least one of alkali metal and alkaline-earth metal. The method according to the present invention can be performed by using, for example, the producing apparatus shown in FIG. 7.
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