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US07795092B2 Semiconductor device and manufacturing method thereof 有权
半导体装置及其制造方法

Semiconductor device and manufacturing method thereof
摘要:
A semiconductor memory device includes gate electrodes extending in a first direction above a surface of a substrate. The semiconductor memory device also includes a reinforcement insulation film formed in a line shape and extending in a second direction crossing the gate electrodes in a plane view viewed from above the surface of the substrate, and connected to adjacent gate electrodes. Further, the semiconductor memory device includes an interlayer dielectric film provided between the adjacent gate electrodes, and having a void inside.
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