发明授权
- 专利标题: Semiconductor device and manufacturing method thereof
- 专利标题(中): 半导体装置及其制造方法
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申请号: US12132450申请日: 2008-06-03
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公开(公告)号: US07795092B2公开(公告)日: 2010-09-14
- 发明人: Yasuyuki Matsuoka , Masaru Kito , Hideaki Aochi , Takayuki Okamura
- 申请人: Yasuyuki Matsuoka , Masaru Kito , Hideaki Aochi , Takayuki Okamura
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-168671 20070627
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A semiconductor memory device includes gate electrodes extending in a first direction above a surface of a substrate. The semiconductor memory device also includes a reinforcement insulation film formed in a line shape and extending in a second direction crossing the gate electrodes in a plane view viewed from above the surface of the substrate, and connected to adjacent gate electrodes. Further, the semiconductor memory device includes an interlayer dielectric film provided between the adjacent gate electrodes, and having a void inside.
公开/授权文献
- US20090001444A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 公开/授权日:2009-01-01
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