发明授权
- 专利标题： Capped sensor
- 专利标题（中）： 覆盖传感器
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申请号： US11039368申请日： 2005-01-20
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公开(公告)号： US07795723B2公开(公告)日： 2010-09-14
- 发明人: Kevin H.-L. Chau , Lawrence E. Felton , John A. Geen , Michael W. Judy , John R. Martin
- 申请人： Kevin H.-L. Chau , Lawrence E. Felton , John A. Geen , Michael W. Judy , John R. Martin
- 申请人地址： US MA Norwood
- 专利权人： Analog Devices, Inc.
- 当前专利权人： Analog Devices, Inc.
- 当前专利权人地址： US MA Norwood
- 代理机构： Sunstein Kann Murphy & Timbers LLP
- 主分类号： H01L23/12
- IPC分类号： H01L23/12
摘要：
A sensor element is capped by bonding or otherwise forming a cap on a sensor element. The sensor may be hermetically sealed by using a hermetic cap and hermetic bonding material or by applying a hermetic coating. The sensor may be filled with a gas at an elevated pressure. The sensor may alternatively or additionally be filled with a special gas, such as a gas having a density-to-viscosity ratio above approximately 0.2.
公开/授权文献
- US20050205959A1 Capped sensor 公开/授权日：2005-09-22
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