发明授权
- 专利标题： Apparatus and method for measuring an environmental condition
- 专利标题（中）： 用于测量环境条件的装置和方法
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申请号： US11526948申请日： 2006-09-25
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公开(公告)号： US07795997B2公开(公告)日： 2010-09-14
- 发明人: John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
- 申请人： John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
- 申请人地址： SG Singapore
- 专利权人： Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人： Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人地址： SG Singapore
- 主分类号： H03H9/00
- IPC分类号： H03H9/00
摘要：
A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.
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