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US07796252B2 Scanning monochromator with direct drive grating 有权
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Scanning monochromator with direct drive grating
摘要:
A novel scanning monochromator uses a PM stepper-motor to directly drive a diffraction grating. By employing interpolated encoder feedback in combination with the PM stepper-motor feedback, a resolution of over 250,000 pulsed steps is available for each revolution of the PM stepper-motor. This translates into more than 20,000 incremental angular-displacement steps over a usable 30° range of dispersion-element rotation. High field accuracy is achieved by a direct PM stepper-driven diffraction grating, and a unique calibration approach based on Wood's anomalies. A plurality of diffracted light beams emerge from the oscillating grating, and these are scanned past a detector for detection, whereby the relative rotation information of the grating can be detected with great accuracy. A number of tolerance-correcting measures are also included to yield an extremely accurate, self-lubricating scanning monochromator that can be economically produced.
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