发明授权
- 专利标题： Suction unit
- 专利标题（中）： 抽油机
-
申请号： US11578990申请日： 2005-04-20
-
公开(公告)号： US07798195B2公开(公告)日： 2010-09-21
- 发明人: Kenji Kobayashi , Masaki Tsujimoto , Takahisa Yoshioka
- 申请人： Kenji Kobayashi , Masaki Tsujimoto , Takahisa Yoshioka
- 申请人地址： JP Tokyo
- 专利权人： Lintec Corporation
- 当前专利权人： Lintec Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Westerman, Hattori, Daniels & Adrian, LLP
- 优先权： JP2004-128124 20040423
- 国际申请： PCT/JP2005/007500 WO 20050420
- 国际公布： WO2005/104201 WO 20051103
- 主分类号： B32B38/10
- IPC分类号： B32B38/10 ; B32B11/00
摘要：
A wafer W is supported on the rear surface side thereof by a ring frame R by means of a dicing tape T, and a protection tape H is stuck on the front surface side the wafer W. A suction unit 12 includes a table 16 having a suction face 15 in the upper face. The suction face 15 sucks the dicing tape T to hold the wafer W through performing a predetermined suction. At least in a partial area along the periphery of the suction face 15, a groove 24 is formed. By sucking through the suction face 15, the inside of the groove 24 becomes negative pressure and the dicing tape T is sunk therein.
公开/授权文献
- US20070169895A1 Suction unit 公开/授权日：2007-07-26
信息查询
