发明授权
- 专利标题: Semiconductor integrated circuit
- 专利标题(中): 半导体集成电路
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申请号: US12048837申请日: 2008-03-14
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公开(公告)号: US07800140B2公开(公告)日: 2010-09-21
- 发明人: Kazuyuki Nakanishi , Hidetoshi Nishimura , Tomoaki Ikegami
- 申请人: Kazuyuki Nakanishi , Hidetoshi Nishimura , Tomoaki Ikegami
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2007-068947 20070316
- 主分类号: H01L27/10
- IPC分类号: H01L27/10
摘要:
A semiconductor integrated circuit is provided which entails no increase in the correction time of OPC and in which non-uniformity in the gate lengths due to the optical proximity effects is surely suppressed. A plurality of standard cells (C1, C2, C3, . . . ), each including gates G extended in the vertical direction, are aligned in the transverse direction to form a standard cell row. A plurality of the standard cell rows are located side by side in the vertical direction to form a standard cell group. Each of the standard cell rows has a terminal standard cell Ce at least one end of the standard cell row. The terminal standard cell Ce includes two or more supplementary gates, each of which is any of a dummy gate and a gate of an inactive transistor.
公开/授权文献
- US20080224176A1 SEMICONDUCTOR INTEGRATED CIRCUIT 公开/授权日:2008-09-18
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