发明授权
- 专利标题: Optoelectric composite substrate and method of manufacturing the same
- 专利标题(中): 光电复合基板及其制造方法
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申请号: US12003122申请日: 2007-12-20
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公开(公告)号: US07801396B2公开(公告)日: 2010-09-21
- 发明人: Hideki Yonekura , Tadashi Kodaira
- 申请人: Hideki Yonekura , Tadashi Kodaira
- 申请人地址: JP Nagano-shi
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人地址: JP Nagano-shi
- 代理机构: Krantz, Quintos & Hanson, LLP
- 优先权: JP2004-051001 20040226
- 主分类号: G02B6/12
- IPC分类号: G02B6/12 ; G02B6/42 ; H01L21/70
摘要:
An optoelectric composite substrate of the present invention includes an insulating film, an optical waveguide embedded in the insulating film in a state that an upper surface is exposed from the insulating film, a via hole formed to pass through the insulating film, a conductor formed in the via hole, and a connection terminal on which an optical device is mounted and which is connected to an upper end side of the conductor, wherein the connection terminal is embedded in an upper-side portion of the via hole or is projected from the insulating film.
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