发明授权
US07803654B2 Variable resistance non-volatile memory cells and methods of fabricating same 失效
可变电阻非易失性存储单元及其制造方法

Variable resistance non-volatile memory cells and methods of fabricating same
摘要:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. Formation of an integrated circuit memory cell include forming a first electrode on a substrate. An insulation layer is formed on the substrate with an opening that exposes at least a portion of a first electrode. An amorphous variable resistivity material is formed on the first electrode and extends away from the first electrode along sidewalls of the opening. A crystalline variable resistivity material is formed in the opening on the amorphous variable resistivity material. A second electrode is formed on the crystalline variable resistivity material.
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