发明授权
- 专利标题: Variable resistance non-volatile memory cells and methods of fabricating same
- 专利标题(中): 可变电阻非易失性存储单元及其制造方法
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申请号: US11862779申请日: 2007-09-27
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公开(公告)号: US07803654B2公开(公告)日: 2010-09-28
- 发明人: Jin-il Lee , Sung-lae Cho , Hye-young Park , Byoung-Jae Bae , Young-Lim Park
- 申请人: Jin-il Lee , Sung-lae Cho , Hye-young Park , Byoung-Jae Bae , Young-Lim Park
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2007-0040501 20070425
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. Formation of an integrated circuit memory cell include forming a first electrode on a substrate. An insulation layer is formed on the substrate with an opening that exposes at least a portion of a first electrode. An amorphous variable resistivity material is formed on the first electrode and extends away from the first electrode along sidewalls of the opening. A crystalline variable resistivity material is formed in the opening on the amorphous variable resistivity material. A second electrode is formed on the crystalline variable resistivity material.
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