发明授权
- 专利标题: Semiconductor or liquid crystal producing device
- 专利标题(中): 半导体或液晶制造装置
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申请号: US10478278申请日: 2003-02-26
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公开(公告)号: US07806984B2公开(公告)日: 2010-10-05
- 发明人: Akira Kuibira , Masuhiro Natsuhara , Hirohiko Nakata
- 申请人: Akira Kuibira , Masuhiro Natsuhara , Hirohiko Nakata
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2002-050629 20020227
- 国际申请: PCT/JP03/02138 WO 20030226
- 国际公布: WO03/072850 WO 20030904
- 主分类号: H01L21/205
- IPC分类号: H01L21/205 ; C23C16/44
摘要:
An apparatus for manufacturing a semiconductor or liquid crystal has, within a reaction chamber 1 to which a reactive gas is supplied, a ceramic holder 2 having a resistive heating element 7 embedded therein; and further comprises a ceramic cylindrical support member 3 one end of which supports the ceramic holder 2 and the other end of which is fixed to a portion of the reaction chamber 1, and an inert gas supply tube 4 and inert gas evacuation tube 5 each having an opening inside the cylindrical support member 3. It is preferable that the inert gas within the cylindrical support member 3 be maintained at less than 0.1 MPa (one atmosphere). By means of such an arrangement, oxidation and corrosion of electrodes provided on the rear surface of the ceramic holder can be prevented, without an oxidation-resistant seal or corrosion-resistant seal being applied. The semiconductor or liquid crystal manufacturing apparatus also ensures the thermal uniformity in the ceramic holder and eliminates useless power consumption. Moreover, the apparatus size can be reduced, and manufacturing costs can be decreased.
公开/授权文献
- US20040144322A1 Semiconductor or liquid crystal producing device 公开/授权日:2004-07-29