Invention Grant
US07808027B2 Free layer/capping layer for high performance MRAM MTJ 有权
用于高性能MRAM MTJ的自由层/覆盖层

Free layer/capping layer for high performance MRAM MTJ
Abstract:
An MTJ MRAM cell and its method of formation are described. The cell includes a composite free layer having the general form (Ni88Fe12)1-xCo100x—Ni92Fe8 with x between 0.05 and 0.1 that provides low magnetization and negative magnetostriction. The magnetostriction can be tuned to a low value by a multilayer capping layer that includes a positive magnetostriction layer of NiFeHf(15%). When this cell forms an MRAM array, it contributes to a TMR≧26%, a TMR/Rp—cov≧15.5 and a high AQF (array quality factor) for write operations.
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