发明授权
- 专利标题: Device for making monocrystalline or multicrystalline materials, in particular multicrystalline silicon
- 专利标题(中): 用于制造单晶或多晶材料的装置,特别是多晶硅
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申请号: US12421051申请日: 2009-04-09
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公开(公告)号: US07811383B2公开(公告)日: 2010-10-12
- 发明人: Matthias Mueller , Markus Finkbeiner , Uwe Sahr , Ingo Schwirtlich , Michael Clauss
- 申请人: Matthias Mueller , Markus Finkbeiner , Uwe Sahr , Ingo Schwirtlich , Michael Clauss
- 申请人地址: DE Mainz
- 专利权人: Schott AG
- 当前专利权人: Schott AG
- 当前专利权人地址: DE Mainz
- 代理商 Michael J. Striker
- 优先权: DE102006017621 20060412
- 主分类号: C30B11/00
- IPC分类号: C30B11/00 ; C30B21/04
摘要:
The device for production of a monocrystalline or a multicrystalline material blank, especially a silicon multicrystalline blank, using the VGF method has a crucible with a rectangular or square cross section. A flat heating device, especially a jacket heater, which generates an inhomogeneous temperature profile, is arranged around the crucible. This temperature profile corresponds to the temperature gradient formed in the center of the crucible. The heat output of the flat heating device decreases from the top to the bottom end of the crucible. The flat heating device includes parallel heating webs, which extend in a meandering course. The heat outputs from the heating webs differ according to their different conductor cross sections. To avoid local overheating in corner areas of the crucible, constrictions of the cross sections of the heating webs are provided at inversion zones of their meandering course.
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