This invention describes methods for fabricating polymer optical waveguides, and polymer optical waveguides themselves wherein at least one of the optical layers is deposited by a two-stage deposition process. In particular, the two-stage deposition process comprises spinning as the second step. Preferably, the polymer optical waveguide comprises a three layer structure comprising a lower cladding layer, a light guiding core layer and an upper cladding layer, supported on a substrate. The invention has particular application to the volume production of polymer optical waveguides on large area substrates.