发明授权
- 专利标题: Fabrication of recordable electrical memory
- 专利标题(中): 可记录电气记忆体的制作
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申请号: US11870215申请日: 2007-10-10
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公开(公告)号: US07811880B2公开(公告)日: 2010-10-12
- 发明人: Geoffrey Wen-Tai Shuy
- 申请人: Geoffrey Wen-Tai Shuy
- 申请人地址: HK Hong Kong
- 专利权人: Hong Kong Applied Science and Technology Research Institute Co., Ltd.
- 当前专利权人: Hong Kong Applied Science and Technology Research Institute Co., Ltd.
- 当前专利权人地址: HK Hong Kong
- 代理机构: gPatent LLC
- 代理商 Stuart T. Auvinen
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A memory cell of a memory device is fabricated by forming a first electrode on a substrate, positioning a photo mask at a first position relative to the substrate, and forming a first material layer on the first electrode based on a pattern on the photo mask. The photo mask is positioned at a second position relative to the substrate, and a second material layer is formed above the first material layer based on the pattern on the photo mask, the second material layer being offset from the first material layer so that a first sub-cell of the memory cell includes the first material layer and not the second material layer, and a second sub-cell of the memory cell includes both the first and second material layers. A second electrode is formed above the first and second material layers.
公开/授权文献
- US20080286955A1 Fabrication of Recordable Electrical Memory 公开/授权日:2008-11-20
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