Invention Grant
US07813395B1 Distributed feedback laser having enhanced etch stop features 有权
分布式反馈激光器具有增强的蚀刻停止特征

Distributed feedback laser having enhanced etch stop features
Abstract:
In one example embodiment, a DFB laser includes a substrate, an active region positioned above the substrate, and a grating layer positioned above the active region. The grating layer includes a portion that serves as a primary etch stop layer. The DFB laser also includes a secondary etch stop layer located either above or below the grating layer, and a spacer layer interposed between the grating layer and the active region.
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