发明授权
- 专利标题: Sheet sticking apparatus and sticking method
- 专利标题(中): 贴纸装置和粘贴方法
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申请号: US12090202申请日: 2006-10-25
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公开(公告)号: US07814954B2公开(公告)日: 2010-10-19
- 发明人: Hideaki Nonaka , Kenji Kobayashi
- 申请人: Hideaki Nonaka , Kenji Kobayashi
- 申请人地址: JP Tokyo
- 专利权人: Lintec Corporation
- 当前专利权人: Lintec Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Lowe, Hauptman, Ham & Berner, LLP
- 优先权: JP2005-338920 20051124
- 国际申请: PCT/JP2006/321223 WO 20061025
- 国际公布: WO2007/060803 WO 20070531
- 主分类号: B32B37/10
- IPC分类号: B32B37/10
摘要:
A sheet sticking apparatus 10 comprises a sheet feed-out unit 12 that feeds out an adhesive sheet S to a position facing a surface of a semiconductor wafer W and a press roller 14 that presses the adhesive sheet S to stick the adhesive sheet S onto the wafer W. The sheet feed-out unit 12 includes a tension measuring means 35 for measuring a tension of the adhesive sheet S between the sheet feed-out unit 12 and the press roller 14 and a sticking angle maintaining means 37 provided with a feed-out head 49 for maintaining a sticking angle θ. After measuring and adjusting the tension immediately before sticking the adhesive sheet S, the feed-out head 49 is lowered in proportion to the movement amount of the press roller 14, thereby the sticking angle θ is maintained, and thus the tension is maintained at a constant level.
公开/授权文献
- US20090229735A1 SHEET STICKING APPARATUS AND STICKING METHOD 公开/授权日:2009-09-17
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