发明授权
- 专利标题: Method for the simultaneous double-side grinding of a plurality of semiconductor wafers
- 专利标题(中): 用于同时双面研磨多个半导体晶片的方法
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申请号: US11774675申请日: 2007-07-09
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公开(公告)号: US07815489B2公开(公告)日: 2010-10-19
- 发明人: Georg Pietsch , Michael Kerstan , Heiko aus dem Spring
- 申请人: Georg Pietsch , Michael Kerstan , Heiko aus dem Spring
- 申请人地址: DE Munich DE Rendsburg
- 专利权人: Siltronic AG,Peter Wolters GmbH
- 当前专利权人: Siltronic AG,Peter Wolters GmbH
- 当前专利权人地址: DE Munich DE Rendsburg
- 代理机构: Brooks Kushman P.C.
- 优先权: DE102006032455 20060713
- 主分类号: B24B49/00
- IPC分类号: B24B49/00 ; B24B51/00
摘要:
A method for the simultaneous double-side grinding of a plurality of semiconductor wafers, involves a process wherein each semiconductor wafer lies such that it is freely moveable in a cutout of one of a plurality of carriers caused to rotate by means of a rolling apparatus and is thereby moved on a cycloidal trajectory, wherein the semiconductor wafers are machined in material-removing fashion between two rotating working disks, wherein each working disk comprises a working layer containing bonded abrasive. The method according to the invention makes it possible, by means of specific kinematics, to produce extremely planar semiconductor wafers.
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