发明授权
- 专利标题: Source for thermal physical vapor deposition of organic electroluminescent layers
- 专利标题(中): 有机电致发光层热物理气相沉积的来源
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申请号: US11266365申请日: 2005-11-04
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公开(公告)号: US07815737B2公开(公告)日: 2010-10-19
- 发明人: Ki Beom Kim , Yoon Soo Han , Yoon Heung Tak , Seok Joo Kim
- 申请人: Ki Beom Kim , Yoon Soo Han , Yoon Heung Tak , Seok Joo Kim
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Morgan Lewis & Bockius LLP
- 优先权: KR2002-42271 20020719; KR2002-58116 20020925; KR2002-59786 20021001
- 主分类号: C23C16/448
- IPC分类号: C23C16/448
摘要:
The present invention disclosed the deposition source installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organic electroluminescent layers onto the substrate, and comprising a vessel consisted of a top plate on which a vapor efflux aperture is formed, a side wall, and a bottom wall; a heating means for supplying heat to the deposition material received in the vessel, the heating means being capable of moving vertically; and a means for moving the heating means (or the bottom wall), the moving means (or the bottom wall) being operated in response to the signal of a sensing means on varied distances between the heating means and the surface of said deposition material. Thus, the heating means is moved downward (or the bottom wall) is moved upward by the moving means to maintain the distance between the heating means (or the substrate to be coated) and the surface of the deposition material at an initially-set value when the thickness of the deposition material is decreased.
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