Invention Grant
- Patent Title: Method and apparatus for producing a dislocation-free crystalline sheet
- Patent Title (中): 用于生产无位错结晶片的方法和装置
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Application No.: US12478513Application Date: 2009-06-04
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Publication No.: US07816153B2Publication Date: 2010-10-19
- Inventor: Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P. T. Bateman , Robert J. Mitchell
- Applicant: Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P. T. Bateman , Robert J. Mitchell
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
Public/Granted literature
- US20090302281A1 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET Public/Granted day:2009-12-10
Information query
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