发明授权
- 专利标题: Method and apparatus for flip-chip bonding
- 专利标题(中): 用于倒装芯片接合的方法和装置
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申请号: US12247312申请日: 2008-10-08
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公开(公告)号: US07816179B2公开(公告)日: 2010-10-19
- 发明人: Sang-cheol Kim
- 申请人: Sang-cheol Kim
- 申请人地址: KR Changwon
- 专利权人: Samsung Techwin Co., Ltd.
- 当前专利权人: Samsung Techwin Co., Ltd.
- 当前专利权人地址: KR Changwon
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: KR10-2005-0073738 20050811
- 主分类号: H01L21/50
- IPC分类号: H01L21/50
摘要:
Provided are a laser flip-chip bonding method having high productivity and excellent bonding reliability and a flip-chip bonder employing the same. The flip-chip bonder includes: a bonding stage on which a substrate rests; a bonding head picking up a semiconductor chip and attaching the semiconductor chip to the substrate; and a semiconductor chip heating unit heating the semiconductor chip to a bonding temperature. The semiconductor chip heating unit includes: a laser light source; and a lens assembly refracting a laser beam emitted by the laser light source to a top surface of the semiconductor chip so that a central position of the laser beam varies across the top surface of the semiconductor chip.
公开/授权文献
- US20090035891A1 METHOD AND APPARATUS FOR FLIP-CHIP BONDING 公开/授权日:2009-02-05
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