Invention Grant
US07816277B2 Method for forming deposit, droplet ejection apparatus, electro-optic device, and liquid crystal display
失效
用于形成沉积物的方法，液滴喷射装置，电光装置和液晶显示器
- Patent Title: Method for forming deposit, droplet ejection apparatus, electro-optic device, and liquid crystal display
- Patent Title (中): 用于形成沉积物的方法，液滴喷射装置，电光装置和液晶显示器
-
Application No.: US11705270Application Date: 2007-02-12
-
Publication No.: US07816277B2Publication Date: 2010-10-19
- Inventor: Kei Hiruma , Osamu Kasuga , Yuji Iwata
- Applicant: Kei Hiruma , Osamu Kasuga , Yuji Iwata
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-034776 20060213; JP2007-002302 20070110
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/469 ; H01L21/44
Abstract:
A deposit forming method including ejecting droplets of a deposit forming material onto a substrate, thereby forming a deposit by the droplets on the substrate, is provided. The droplets are ejected along a direction inclined at a predetermined angle in a predetermined direction with respect to a normal line of the substrate and at a predetermined pitch in the predetermined direction. The predetermined angle is set in correspondence with the diameter of each of the droplets and the predetermined pitch in such a manner that the dimension of a dot formed by each droplet on the substrate in the predetermined direction becomes greater than or equal to the predetermined pitch.
Public/Granted literature
- US20070188534A1 Method for forming deposit, droplet ejection apparatus, electro-optic device, and liquid crystal display Public/Granted day:2007-08-16
Information query
IPC分类:
