发明授权
- 专利标题： Immersion gun equipped electron beam column
- 专利标题（中）： 沉枪配电子束柱
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申请号： US12204841申请日： 2008-09-05
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公开(公告)号： US07821187B1公开(公告)日： 2010-10-26
- 发明人: Xinrong Jiang , Marian Mankos , Liqun Han
- 申请人： Xinrong Jiang , Marian Mankos , Liqun Han
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Luedeka, Neely & Graham, P.C.
- 主分类号： H01J27/02
- IPC分类号： H01J27/02
摘要：
An electron gun of the type having an electron emitter for emitting electrons, including an electrostatic lens and a magnetic lens formed by pole pieces with a winding coil disposed between the magnetic pole pieces. The magnetic lens forms a rotationally symmetrical magnetic field in a gap formed by the pole pieces. The magnetic field forms the magnetic lens and focuses the electrons emitted from the emitter. A vacuum tube separates the electron gun from the magnetic lens. The electron gun is sealed in a vacuum by the vacuum tube and the magnetic lens is shielded in air.
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