发明授权
- 专利标题: Load lock chamber with heater in tube
- 专利标题(中): 带加热器的加载锁定室
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申请号: US11782290申请日: 2007-07-24
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公开(公告)号: US07822324B2公开(公告)日: 2010-10-26
- 发明人: Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
- 申请人: Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: F26B3/30
- IPC分类号: F26B3/30
摘要:
Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.
公开/授权文献
- US20080118236A1 LOAD LOCK CHAMBER WITH HEATER IN TUBE 公开/授权日:2008-05-22
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