Invention Grant
US07823436B2 Method and apparatus for in situ testing of gas flow controllers
有权
用于气体流量控制器原位测试的方法和装置
- Patent Title: Method and apparatus for in situ testing of gas flow controllers
- Patent Title (中): 用于气体流量控制器原位测试的方法和装置
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Application No.: US12354723Application Date: 2009-01-15
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Publication No.: US07823436B2Publication Date: 2010-11-02
- Inventor: Joseph R. Monkowski , Jialing Chen , Tao Ding , James MacAllen Chalmers
- Applicant: Joseph R. Monkowski , Jialing Chen , Tao Ding , James MacAllen Chalmers
- Applicant Address: US CA Pleasanton
- Assignee: Pivotal Systems Corporation
- Current Assignee: Pivotal Systems Corporation
- Current Assignee Address: US CA Pleasanton
- Agency: Nixon Peabody LLP.
- Agent Joseph Bach, Esq.
- Main IPC: G01P21/00
- IPC: G01P21/00

Abstract:
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
Public/Granted literature
- US20090183548A1 METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS Public/Granted day:2009-07-23
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