Invention Grant
- Patent Title: Cantilever and cantilever manufacturing method
- Patent Title (中): 悬臂和悬臂制造方法
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Application No.: US11709495Application Date: 2007-02-22
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Publication No.: US07823470B2Publication Date: 2010-11-02
- Inventor: Masatsugu Shigeno , Osamu Matsuzawa , Naoya Watanabe , Amiko Nihei , Akira Inoue , Yoshiharu Shirakawabe , Hiroshi Muramatsu , Yuji Yamamoto
- Applicant: Masatsugu Shigeno , Osamu Matsuzawa , Naoya Watanabe , Amiko Nihei , Akira Inoue , Yoshiharu Shirakawabe , Hiroshi Muramatsu , Yuji Yamamoto
- Applicant Address: JP
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2006-072673 20060316
- Main IPC: G01Q70/00
- IPC: G01Q70/00 ; G01Q70/10 ; G01B21/30
Abstract:
A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.
Public/Granted literature
- US20070214875A1 Cantilever and cantilever manufacturing method Public/Granted day:2007-09-20
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