Invention Grant
- Patent Title: Ultrasonic bonding apparatus
- Patent Title (中): 超声波接合装置
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Application No.: US12564444Application Date: 2009-09-22
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Publication No.: US07823618B2Publication Date: 2010-11-02
- Inventor: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- Applicant: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
An ultrasonic bonding apparatus includes a head that includes a tool surface configured to mount an electronic component, an ultrasonic bonding unit configured to ultrasonically bond the electronic component with a substrate, and a wiping unit configured to wipe out pre-cured underfill that has adhered to the tool surface of the head, by using a wiping member on a wiping table. The wiping unit includes a solvent supply unit configured to supply a solvent configured to powder the underfill, to the wiping member on the wiping table, a sealed cartridge configured to house the wiping table and a feed mechanism configured to supply the wiping member to the wiping table and to roll up the wiping member from the wiping table, and a cartridge support member that includes a motor configured to drive the feed mechanism, and is detachably attached to the cartridge.
Public/Granted literature
- US20100006231A1 ULTRASONIC BONDING APPARATUS Public/Granted day:2010-01-14
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