Invention Grant
- Patent Title: Substrate storage container
- Patent Title (中): 基材储存容器
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Application No.: US10525502Application Date: 2003-08-19
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Publication No.: US07823730B2Publication Date: 2010-11-02
- Inventor: Hiroshi Mimura , Wataru Niiya , Toshitsugu Yajima
- Applicant: Hiroshi Mimura , Wataru Niiya , Toshitsugu Yajima
- Applicant Address: JP Chuo-Ku, Tokyo
- Assignee: Shin-Etsu Polymer Co., Ltd.
- Current Assignee: Shin-Etsu Polymer Co., Ltd.
- Current Assignee Address: JP Chuo-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2002-265596 20020911; JP2002-275495 20020920
- International Application: PCT/JP03/10465 WO 20030819
- International Announcement: WO2004/025721 WO 20040325
- Main IPC: B65D85/30
- IPC: B65D85/30 ; B65D51/16 ; H01L21/02

Abstract:
A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.
Public/Granted literature
- US20050247594A1 Substrate-storing container Public/Granted day:2005-11-10
Information query
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