Invention Grant
- Patent Title: Stepper mechanism
- Patent Title (中): 步进机制
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Application No.: US11808197Application Date: 2007-06-07
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Publication No.: US07823880B2Publication Date: 2010-11-02
- Inventor: Jeroen J. G. Coenen , Bae W. J. J. A. Van Dorp
- Applicant: Jeroen J. G. Coenen , Bae W. J. J. A. Van Dorp
- Applicant Address: NL Venlo
- Assignee: OCE-Technologies B.V.
- Current Assignee: OCE-Technologies B.V.
- Current Assignee Address: NL Venlo
- Agency: Birch Stewart Kolasch & Birch, LLP
- Priority: EP06115164 20060608
- Main IPC: B65H5/12
- IPC: B65H5/12

Abstract:
A stepper mechanism for transporting a substrate along a linear transport path, which includes a stationary member and first and second transport members, extending widthwise across the transport path, the stationary member and transport members each being adapted to alternatively grip and release the substrate, and independent drive units are arranged on either side of the transport path for moving the respective ends of the transport members in a transport direction (X), wherein the transport members are movable independently of one another, and at least one of the drive units is adapted to move one end of the first transport member independently of the corresponding end of the second transport member.
Public/Granted literature
- US20080251986A1 Stepper mechanism Public/Granted day:2008-10-16
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