Invention Grant
- Patent Title: Composite mechanical transducers and approaches therefor
- Patent Title (中): 复合机械传感器及其方法
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Application No.: US12017228Application Date: 2008-01-21
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Publication No.: US07824098B2Publication Date: 2010-11-02
- Inventor: Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
- Applicant: Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Crawford Maunu PLLC
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01R3/00 ; G01K11/22

Abstract:
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
Public/Granted literature
- US20080204173A1 COMPOSITE MECHANICAL TRANSDUCERS AND APPROACHES THEREFOR Public/Granted day:2008-08-28
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