Invention Grant
- Patent Title: Stator vane of turbo molecular pump
- Patent Title (中): 涡轮分子泵的定子叶片
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Application No.: US11662229Application Date: 2005-08-26
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Publication No.: US07824153B2Publication Date: 2010-11-02
- Inventor: Takeshi Akimoto , Shinji Kawanishi
- Applicant: Takeshi Akimoto , Shinji Kawanishi
- Applicant Address: JP
- Assignee: BOC Edwards Japan Limited
- Current Assignee: BOC Edwards Japan Limited
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2004-264426 20040910
- International Application: PCT/JP2005/015518 WO 20050826
- International Announcement: WO2006/027961 WO 20060316
- Main IPC: F01D9/04
- IPC: F01D9/04

Abstract:
A stator vane for a turbo molecular pump has stator vane halves each having inner and outer rim portions and radially arranged stator blades connected integrally between the inner and outer rim portions. The inner rim portion of each stator vane half has a pair of inner rim ends and the outer rim portion of each stator vane half has a pair of outer rim ends. The stator vane halves are disposed in abutment with one another along an abutment line to form an annular body with the inner rim ends of one of the stator vane halves being disposed in confronting relation with the respective inner rim ends of the other of the stator vane halves and with the outer rim ends of the one of the stator vane halves being disposed in confronting relation with the respective outer rim ends of the other of the stator vane halves. At least each of the inner rim ends or each of the outer rim ends of one of the two stator blade halves being formed shorter in a circumferential direction of the annular body with respect to the abutment line to form a gap between the confronting inner rim ends or the confronting outer rim ends.
Public/Granted literature
- US20080118351A1 Stator Vane Of Turbo Molecular Pump Public/Granted day:2008-05-22
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