Invention Grant
- Patent Title: Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
- Patent Title (中): 用于制造磁记录盘的设备和在线型衬底处理设备
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Application No.: US12037021Application Date: 2008-02-25
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Publication No.: US07824497B2Publication Date: 2010-11-02
- Inventor: Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
- Applicant: Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
- Applicant Address: JP Tokyo
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Tokyo
- Agency: DLA Piper LLP (US)
- Priority: JP2000-024334 20000201
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/00

Abstract:
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
Public/Granted literature
- US20080216744A1 Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus Public/Granted day:2008-09-11
Information query
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