Invention Grant
- Patent Title: Variable volume plasma processing chamber and associated methods
- Patent Title (中): 可变体积等离子体处理室及相关方法
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Application No.: US11750985Application Date: 2007-05-18
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Publication No.: US07824519B2Publication Date: 2010-11-02
- Inventor: Ing-Yann Albert Wang , Robert Chebi
- Applicant: Ing-Yann Albert Wang , Robert Chebi
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla & Gencarella, LLP
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; C23C16/00

Abstract:
A plasma processing chamber includes a substrate support having a top surface defined to support a substrate in a substantially horizontal orientation within the chamber. The plasma processing chamber also includes a number of telescopic members disposed within the chamber outside a periphery of the substrate support. The number of telescopic members are also disposed in a concentric manner with regard to a center of the top surface of the substrate support. Each of the number of telescopic members is defined to be independently moved in a substantially vertical direction so as to enable adjustment of an open volume above the top surface of the substrate support, and thereby enable adjustment of a plasma condition within the open volume above the top surface of the substrate support.
Public/Granted literature
- US20080286489A1 Variable Volume Plasma Processing Chamber and Associated Methods Public/Granted day:2008-11-20
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