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US07824618B2 Sensor structure and method of fabricating the same 有权
传感器结构及其制造方法

Sensor structure and method of fabricating the same
Abstract:
Provided is a sensor structure comprising a heater and a temperature sensor at the center of a membrane having a well structure, allowing a temperature to be rapidly controlled with low power, and the object is analyzed using a conductivity change measured at two or more substrate temperatures with a pair of detecting electrode and a detecting layer implemented on the heater, wherein the sensing layer can include a conductive particle and a non-conductive organic composite.
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