Invention Grant
US07824954B2 Methods of forming phase change memory devices having bottom electrodes
有权
形成具有底部电极的相变存储器件的方法
- Patent Title: Methods of forming phase change memory devices having bottom electrodes
- Patent Title (中): 形成具有底部电极的相变存储器件的方法
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Application No.: US12170038Application Date: 2008-07-09
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Publication No.: US07824954B2Publication Date: 2010-11-02
- Inventor: Hyeong-Geun An , Dong-Ho Ahn , Young-Soo Lim , Yong-Ho Ha , Jun-Young Jang , Dong-Won Lim , Gyeo-Re Lee , Joon-Sang Park , Han-Bong Ko , Young-Lim Park
- Applicant: Hyeong-Geun An , Dong-Ho Ahn , Young-Soo Lim , Yong-Ho Ha , Jun-Young Jang , Dong-Won Lim , Gyeo-Re Lee , Joon-Sang Park , Han-Bong Ko , Young-Lim Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2007-0070153 20070712; KR10-2007-0073521 20070723
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
Phase change memory devices can have bottom patterns on a substrate. Line-shaped or L-shaped bottom electrodes can be formed in contact with respective bottom patterns on a substrate and to have top surfaces defined by dimensions in x and y axes directions on the substrate. The dimension along the x-axis of the top surface of the bottom electrodes has less width than a resolution limit of a photolithography process used to fabricate the phase change memory device. Phase change patterns can be formed in contact with the top surface of the bottom electrodes to have a greater width than each of the dimensions in the x and y axes directions of the top surface of the bottom electrodes and top electrodes can be formed on the phase change patterns, wherein the line shape or the L shape represents a sectional line shape or a sectional L shape of the bottom electrodes in the x-axis direction.
Public/Granted literature
- US20090017577A1 Methods of Forming Phase Change Memory Devices Having Bottom Electrodes Public/Granted day:2009-01-15
Information query
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