Invention Grant
US07824968B2 LDMOS using a combination of enhanced dielectric stress layer and dummy gates
有权
LDMOS使用增强介电应力层和虚拟门的组合
- Patent Title: LDMOS using a combination of enhanced dielectric stress layer and dummy gates
- Patent Title (中): LDMOS使用增强介电应力层和虚拟门的组合
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Application No.: US11488117Application Date: 2006-07-17
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Publication No.: US07824968B2Publication Date: 2010-11-02
- Inventor: Sanford Chu , Yisuo Li , Guowei Zhang , Purakh Raj Verma
- Applicant: Sanford Chu , Yisuo Li , Guowei Zhang , Purakh Raj Verma
- Applicant Address: SG Singapore
- Assignee: Chartered Semiconductor Manufacturing Ltd
- Current Assignee: Chartered Semiconductor Manufacturing Ltd
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte Ltd
- Main IPC: H01L21/332
- IPC: H01L21/332 ; H01L21/336

Abstract:
First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprises forming a MOS FET and at least a dummy gate over a substrate. The MOS is comprised of a gate, channel, source, drain and offset drain. At least one dummy gate is over the offset drain. A stress layer is formed over the MOS and the dummy gate. The stress layer and the dummy gate improve the stress in the channel and offset drain region.
Public/Granted literature
- US20080014690A1 LDMOS using a combination of enhanced dielectric stress layer and dummy gates Public/Granted day:2008-01-17
Information query
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