Invention Grant
- Patent Title: Finfet devices and methods for manufacturing the same
- Patent Title (中): Finfet设备及其制造方法
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Application No.: US12018492Application Date: 2008-01-23
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Publication No.: US07824969B2Publication Date: 2010-11-02
- Inventor: Huilong Zhu
- Applicant: Huilong Zhu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Abate
- Main IPC: H01L21/332
- IPC: H01L21/332

Abstract:
Disclosed herein is a tunneling fin field effect transistor comprising a fin disposed on a box layer disposed in a wafer; the wafer comprising a silicon substrate and a buried oxide layer. The fin comprises a silicide body that comprises a first silicide region and a second silicide region and forms a short between N and P doped regions. The silicide body is disposed on a surface of the buried oxide layer. A tunneling device disposed between the first silicide region and the second silicide region; the tunneling device comprising a first P-N junction. A gate electrode is further disposed around the fin; the gate electrode comprising a second P-N junction, and a third silicide region; the third silicide region forming a short between N and P doped regions in the gate electrode.
Public/Granted literature
- US20090184369A1 FINFET DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2009-07-23
Information query
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