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US07824969B2 Finfet devices and methods for manufacturing the same 有权
Finfet设备及其制造方法

Finfet devices and methods for manufacturing the same
Abstract:
Disclosed herein is a tunneling fin field effect transistor comprising a fin disposed on a box layer disposed in a wafer; the wafer comprising a silicon substrate and a buried oxide layer. The fin comprises a silicide body that comprises a first silicide region and a second silicide region and forms a short between N and P doped regions. The silicide body is disposed on a surface of the buried oxide layer. A tunneling device disposed between the first silicide region and the second silicide region; the tunneling device comprising a first P-N junction. A gate electrode is further disposed around the fin; the gate electrode comprising a second P-N junction, and a third silicide region; the third silicide region forming a short between N and P doped regions in the gate electrode.
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