Invention Grant
US07824979B2 Semiconductor device with channel of FIN structure and method for manufacturing the same 有权
具有FIN结构通道的半导体器件及其制造方法

Semiconductor device with channel of FIN structure and method for manufacturing the same
Abstract:
Provided are a semiconductor device with a channel of a FIN structure and a method for manufacturing the same. In the method, a device isolation layer defining an active region is formed on a semiconductor substrate. A recess trench with a first width is formed in the active region, and a trench with a second width larger than the first width is formed in the device isolation layer. The trench formed in the device isolation layer is filled with a capping layer. A cleaning process is performed on the recess trench to form a bottom protrusion of a FIN structure including a protrusion and a sidewall. Gate stacks filling the recess trench are formed. A landing plug, which is divided by the capping layer filling the trench, is formed between the gate stacks.
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