Invention Grant
- Patent Title: Semiconductor device with channel of FIN structure and method for manufacturing the same
- Patent Title (中): 具有FIN结构通道的半导体器件及其制造方法
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Application No.: US12163926Application Date: 2008-06-27
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Publication No.: US07824979B2Publication Date: 2010-11-02
- Inventor: Jin Yul Lee
- Applicant: Jin Yul Lee
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2008-0041745 20080506
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Provided are a semiconductor device with a channel of a FIN structure and a method for manufacturing the same. In the method, a device isolation layer defining an active region is formed on a semiconductor substrate. A recess trench with a first width is formed in the active region, and a trench with a second width larger than the first width is formed in the device isolation layer. The trench formed in the device isolation layer is filled with a capping layer. A cleaning process is performed on the recess trench to form a bottom protrusion of a FIN structure including a protrusion and a sidewall. Gate stacks filling the recess trench are formed. A landing plug, which is divided by the capping layer filling the trench, is formed between the gate stacks.
Public/Granted literature
- US20090278183A1 Semiconductor Device with Channel of Fin Structure and Method for Manufacturing the Same Public/Granted day:2009-11-12
Information query
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